Arxiv 2609 11299v1 A Two Mirror Faceted Projection System For Euv Lit
ASecurity
**arXiv ID:** 2609.11299v1 **Authors:** Vasiliy A. Es'kin, Egor V. Ivanov, Olga V. Martynova **URL:** http://arxiv.org/abs/2609.11299v1 **Utility Score:** 1.00
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--
name: arxiv-2609-11299v1-a-two-mirror-faceted-projection-system-for-euv-lit
description: 'A Two-Mirror Faceted Projection System for EUV Lithography (arXiv: 2609.11299v1)'
metadata:
{
"arxiv_id": "2609.11299v1",
"utility": 1.0,
"title": "A Two-Mirror Faceted Projection System for EUV Lithography",
"authors": "Vasiliy A. Es'kin, Egor V. Ivanov, Olga V. Martynova",
"url": "http://arxiv.org/abs/2609.11299v1"
}
--
# A Two-Mirror Faceted Projection System for EUV Lithography
**arXiv ID:** 2609.11299v1
**Authors:** Vasiliy A. Es'kin, Egor V. Ivanov, Olga V. Martynova
**URL:** http://arxiv.org/abs/2609.11299v1
**Utility Score:** 1.00
## Summary
This skill was automatically generated from the arXiv paper titled "A Two-Mirror Faceted Projection System for EUV Lithography" (ID: 2609.11299v1).
## Usage
This skill can be used to reference the paper's concepts, methodologies, or findings in agent workflows.
## References
- arXiv: http://arxiv.org/abs/2609.11299v1
